Photo detector and optically interconnected lsi

ABSTRACT

A photo detector having an electrically conductive thin film and a light-receiving unit. A coupling periodic structure is provided on a surface of the film and converts incidence light to surface plasmon. The coupling periodic structure has an opening that penetrates the obverse and reverse surfaces of the thin film. The light-receiving unit is provided at one end of the opening in the surface that is opposite to the surface on which the coupling periodic structure is provided. The opening is shaped like a slit and is broader than half (½) the wavelength of the surface plasmon in a direction that intersects at right angles with a polarization direction of the incidence light and is narrower than half (½) the wavelength of the surface plasmon in a direction parallel to the polarization direction.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a Divisional Application of U.S. application Ser.No. 11/610,151, filed Dec. 13, 2006, which is based upon and claims thebenefit of priority from prior Japanese Patent Application No.2006-069535, filed Mar. 14, 2006, the entire contents of which areincorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a photo detector having a plasmonfocusing antenna, and to an optically interconnected LSI using suchphoto detectors.

2. Description of the Related Art

In recent years, the operating speed of large-scale integrated circuits(LSIs) has greatly increased, thanks to the improved performance ofelectronic devices such as bipolar transistors and field-effecttransistors. The performance has been improved, owning to the decreasein transistor size. However, since the wires connecting transistors arenow thin, the line resistance and the inter-line capacitance haveincreased, making great problems. These problems are a bottleneck of theimprovement in LSI performance.

In view of the problem resulting from electric wires, some types ofoptically interconnected LSI, in which the components are interconnectedby optical lines, have been proposed. Power loss in optical lines hasvirtually no dependence on frequency, ranging from direct current to 100GHz or more. Further, the optical lines impose virtually noelectromagnetic interference. Lines several 10 Gbps or more cantherefore be realized easily.

The optical lines in an LSI need high-speed photo detectors made ofsilicon (Si), i.e., the substrate material of the LSI. Si is an indirecttransition semiconductor, and its optical absorption efficiency isgenerally low. Inevitably it can hardly achieve both highlight-receiving efficiency and high operating speed.

To solve this problem, photo detectors of plasmon focusing antenna typeare known. Any element of this type utilizes surface plasmon thatpropagates in the surface of an electrically conductive member made of,for example, metal. (See Japanese Journal of Applied Physics, Vol. 44,No. 12, and p. L364 (2005), hereinafter referred to as Document 1.)Light focusing and light passage through a small opening, both achievedby surface plasmon, are known in the art. (See Optics Letters, Vol. 26,No. 24, and p. 1972 (2001), referred to as Document 2.) On the otherhand, in laser elements that differ from the photo detectors of plasmonfocusing antenna type, a small asymmetrical opening may be used toimprove the efficiency of transmitting light through a small opening.(See JP-A 2001-189519 (KOKAI), referred to as Document 3).

In the technology disclosed in Document 1, photoelectric conversion mustbe performed immediately after the light focused by the plasmon focusingantenna passes through the small opening. That is, a light-receiving Silayer must be arranged at the exit of the small opening in order toaccomplish the photoelectric conversion. If the small opening is long(the length is equivalent to the thickness of an electrically conductivethin film), the light will be greatly attenuated as it passes throughthe small opening. Therefore, the electrically conductive thin filmconstituting the plasmon focusing antenna must be thin, but not so thinto allow the passage of light.

Hence, to apply optical lines to LSIs, one of the following two methodsshould be used. In one method, photo detectors of plasmon focusingantenna type are formed in transistor-forming surface (i.e., surface ofthe SI substrate). In the other method, photo detectors of focusingantenna type are formed on the multilayer interconnection lines of theLSI, and signals these elements have generated through photoelectricconversion are transferred via electric lines.

However, the method, in which photo detectors of plasmon focusingantenna type are formed in a transistor-forming surface, will reduce thenumber of transistors than can be formed in unit area of the LSI. Sincemethod impairs the essential function of the LSI, it is not practical.The method, in which photo detectors of focusing antenna type are formedon LSI multilayer interconnection lines and electric wiring from theseelements the surface of the Si substrate, is likely to make problems,such as signal degradation due to parasitic LCR in the electric lines,an increase in noise, and crosstalk to the other electric lines. Inother words, the optical lines may impair the high operating speed.

In the method disclosed in Document 2, it is desirable to make theopening smaller in order to achieve a high-speed response.

If the opening is made smaller, however, the amount of light that passesthrough the surface plasmon may decrease.

BRIEF SUMMARY OF THE INVENTION

According to an aspect of this invention, there is provided anelectrically conductive thin film which has an first surface, a secondsurface opposite to the first surface and a coupling periodic structureprovided on the first surface, the electrically conductive thin filmconfigured to convert incidence light to surface plasmon and includingan opening penetrating the first surface and the second surface withinthe coupling periodic structure, and the opening being formed of a slithaving a length longer than half a wavelength of the surface plasmon ina direction that intersects at right angle with a polarization directionof the incidence light and a width narrower than half the wavelength ofthe surface plasmon in a direction that is parallel to the polarizationdirection; and

a light-receiving unit configured to receive the surface plasmon andarranged at one end of the opening in the second surface.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING

FIG. 1 is a plan view showing the configuration of the plasmon focusingantenna used in a photo detector according to a first embodiment;

FIG. 2 is a partly cutaway, perspective view showing the configurationof the photo detector according to the first embodiment;

FIG. 3 is a magnified perspective view showing the main section of thephoto detector concerning to the first embodiment;

FIG. 4 is a sectional view showing the configuration of the photodetector according to the first embodiment.

FIG. 5 is a plan view showing the configuration of the plasmon focusingantenna used in a photo detector according to the second embodiment;

FIG. 6 is a partly cutaway, perspective view showing the configurationof the photo detector according to the second embodiment;

FIG. 7 is a magnified perspective view showing the important section ofthe photo detector concerning the second embodiment;

FIG. 8 is a partly cutaway, perspective view showing the configurationof an optically interconnected LSI according to a third embodiment; and

FIG. 9 is a magnified perspective view showing the important section ofthe optically interconnected LSI according to the third embodiment.

DETAILED DESCRIPTION OF THE INVENTION

The gist of the present invention is to provide a plasmon focusingantenna for receiving light, on the multilayer interconnection of anLSI, or in the multilayer interconnection of the LSI. The surfaceplasmon focused is transmitted to the surface of the Si substrate by awaveguide having a small opening. Light is thereby applied there (andundergoes photoelectric conversion).

Generally, the amount of light passing though an opening smaller thanthe wavelength of the light drastically decreases as the size of theopening decreases. Therefore, in the present invention, incident lightis focused in a specific polarization direction, and polarizationselection transmission is performed by using an asymmetrical opening.Alternatively, the light is focused in a specific direction) innon-selection manner, and a synthetic opening composed of asymmetricalopenings that intersect with each other at right angles performsseparation and transmission of polarized light.

Hereinafter, the present invention will be described in detail, withreference to the embodiments shown in the accompanying drawings.

The invention will be described on the assumption that Si is used aslight-receiving material. Nevertheless, the invention can be similarlyreduced to practice if the light-receiving unit (photoelectrictransducer unit) has light-receiving material such as SiGe, SiC, GaAs,InP, GaInAs, GaInAsP, AlGaAs, or the like. Only one photo detectors(optically connected receiving section) is shown here. In practice,however, a number of photo detectors are integrated and formed on an LSIchip. The photo detectors and the optical lines connecting theseelements are used in any numbers desired.

First Embodiment

There will be described the plasmon focusing antenna unit used in aphoto detector according to a first embodiment referring to FIG. 1.

In FIG. 11, number 11 denotes an electrically conductive thin film,number 12 indicates a concentric circular periodic structure (apartially dug pattern), and number 13 designates an opening. The opening13 penetrates the electrically conductive thin film 11, extending fromthe upper surface to the lower surface. The concentric circular periodicstructure 12 is a partially dug pattern that has been made by etchingparts of the surface of the electrically conductive thin film. The innerregion (A) of the concentric circular periodic structure 12 is a jointperiodic structure that couples the light applied perpendicular to theplane of the drawing, to the surface plasmon. The outer region (B) ofthe concentric circular periodic structure 12 is a reflective periodicstructure that performs Bragg reflection on that component of thesurface plasmon thus coupled by the joint periodic structure (A), whichis emitted outwards from the element, thereby applying this componentback to the inner region.

The electrically conductive thin film 11 may be made of metal such asAg, Au, Cu, Al, Ni, Pd, Pt, W, Ti, Cr or Mo. It may be formed by amethod such as sputtering, heating vapor deposition, or the like. Theelectrically conductive thin film 11 is made of Ag and formed on thesurface of the Si substrate for forming a photo detector, which will bedescribed later. The film 11 is, for example, 100 nm think.

The concentric circular periodic structure 12 should have a cycle fitfor the wavelength of the light it has received. Cycle Pc of the jointperiodic structure (A) is approximated as:

Pc≅λ(1/∈1+1/∈2)^(1/2)

where λ is the wavelength of light received, ∈1 is the dielectricconstant of the electrically conductive thin film 11, and /∈2 is thedielectric constant of the material contacting the electricallyconductive thin film.

Cycle Pb of the reflective periodic structure (B) may be set to:

Pb=Pc/2.

As an example, a concentric circular periodic structure was made at thedepth of 50 nm as shown in FIG. 1, using a focused ion beam (FIB) devicein the surface of an electrically conductive thin film 11 (Ag-layerthickness of 100 nm). When air was at the surface of the electricallyconductive thin film 11, Pc was set to 840 nm (Pb=420 nm). When a SiO₂passivation film about 1 μm thick was formed on the surface of theelectrically conductive thin film 11, Pc was set to 560 nm (Pb=280 nm).In either case, the center wavelength λ at which light could be receivedwill be in the vicinity of 850 nm. As shown in FIG. 1, the concentriccircular periodic structure 12 consists of two symmetrical sectors whosecenter is the opening 13 and whose opening angle is 45°. This shape isequivalent to a shape defined by first dividing the concentric circularperiodic structure 12 into four segments and then discarding every othersegment.

Since the structure 12 is so shaped, the light polarized along the axisof the sectors (i.e., the left-to-right direction in FIG. 1) isconverted to surface plasmon. The component of light, which is polarizedin the direction intersecting at right angles with that axis is notfocused. This means that the light component coming through the opening13 made in the center of the film 11 is polarized along the axis of thesectors and can be selectively received. To ensure the separation of thepolarized components of light, it is necessary only to discard the lightcoming at a sector angle of about 45°. For this purpose, the openingangle of each sector shown in FIG. 1 needs only to be set to, forexample, 30°.

The opening 13 shown in FIG. 1 should be so small that thelight-receiving layer that performs photoelectric conversion on thecoming light may be limited to a sufficiently small region. As standard,the opening 13 is a little longer than half (½) the plasmon wavelengthin the direction intersecting at right angles to the axis of the sectorsshown in FIG. 1, and shorter than half (½) the plasmon wavelength in thedirection parallel to the axis of the sectors. That is, the opening 13is shaped like a slit relevant to the polarization in which theincidence light is polarized. Strictly speaking, the plasmon wavelengthλp is the plasmon wavelength in the opening strictly. Nevertheless, itis almost the same as the above-mentioned Pc (equivalent to the plasmonwavelength at the surface of the plasmon focusing antenna). For thisreason, the short sides (extending in polarization direction) of theopening 13 may be considerably shorter than Pc/2 if its long sides(extending at right angles to the polarization direction) are equal toor longer than Pc/2.

If λ≅850 nm, for example, a SiO₂ passivation film about 1 μm thick maybe formed on the surface of the electrically conductive thin film 11. Inthis case, the long sides (extending at right angles to the polarizationdirection) of the opening 13 are 280 nm or more long (for example, 400nm long), and the short sides of the opening 13 are 280 nm or less long(for example, 100 nm long). The opening 13 is a hole that penetrates theelectrically conductive thin film 11. If the Ag thickness is 100 nm asdescribed above, a groove that is 400 nm long and 100 nm wide may bemade to the depth of 100 nm by means of FIB.

This configuration can decrease the propagation loss in the opening 13,because of the principle disclosed in Document 3. Even if only the parthaving the opening 13 is formed thick, the plasmon attenuation in theopening 13 can be greatly suppressed. Assume that the part having theopening 13 has a thickness (opening length) of 1 micron. Then, thetransmissivity of the polarized light at right angles to the long sidesof the slit-shaped opening (400 nm×100 nm) is estimated at about 41%. Onthe other hand, the transmissivity of the polarized light parallel tothe long sides of the slit-shaped opening was substantially zero (to1×10⁻¹⁸). Transmissivity of about 6% can be secured for the polarizedlight at right angles to the long sides of the slit-shaped opening (400nm×100 nm) also considering the thickness (opening length) even if theopening 13 is 10 micrometers thick (or long).

Transmissivity at, for example, an opening (diameter: 226 nm) having thesame area as the slit-shaped opening is estimated to be 2×10⁻⁹, oralmost zero if the opening length is 1 micron. Thus, the thickness ordiameter of the opening should be large in the conventional technology.If the part having the above-mentioned circular opening is 100 nm thick,the transmissivity will be about 16%. If the part having the opening is1 micrometer thick and the opening has a diameter of 500 nm,transmissivity of about 80% can be attained. In this case, however, thateffective opening area is as large as about five times that of theslit-shaped opening 5 of the present embodiment.

To provide a circular opening as large as 500 nm across, a conductivepillar having a larger diameter (e.g., 800 nm) is required. Once theantenna unit has been mounted on a LSI, which will be described later,it imposes prominent limitation to the layout of multilayerinterconnection and the arrangement of transistors. Further, theintegration density of transistors in the light-receiving unitdecreases, which results in the transistor density of the LSI. Stillfurther, if the area of a photo detector becomes large with sizeincrease of the opening system, and if a photodiode is formed of a pnjunction, a high-speed response will hardly be achieved, because thejunction capacitance is large.

Hence, the long sides of the opening 13 should extend at right angles tothe direction in which the incidence light is polarized, in the presentembodiment (FIG. 1). To fulfill this condition, use is made of theplasmon focusing antenna that comprises sector-shaped parts as describedabove. If a conventional plasmon focusing antenna having perfectlyconcentric circle parts is used in place of the above-described antennahaving a slit-shaped opening 13, the following problems will arise. Thatis, polarized light components parallel to the long sides of theslit-shaped opening cannot enter the opening 13. These components arereflected many times and confined by a reflective periodic structure (B)until they are attenuated by scattering or absorption on the plasmonfocusing antenna. In this case, a part of the scattered surface plasmonwill be a component that can enter the slit-shaped opening 13 and willbecome delayed incidence light. The delayed incidence light will degradethe waveform received and increase the noise.

A photo detector that has a plasmon focusing antenna of the type shownin FIG. 1 will be described in detail, with reference to FIGS. 2 to 4.FIGS. 2 and 3 are perspective views, each not showing a quarter cut awayalong lines I-I and taken along part I-13-I′ shown in FIG. 1. In FIGS. 2and 3, number 14 denotes an n-type Si substrate, number 15 indicates aback electrode (made of, for example, Al), number 16 designates alow-concentration Si layer, and number 17 denotes a SiO₂ thermallyoxidized film. FIG. 4 is a sectional view taken along part I-I″ shown inFIG. 1.

Although not shown in FIGS. 2 to 4, a SiO₂ passivation film may beformed on the electrically conductive thin film 11. In that case, thefunction becomes equivalent by changing the cycle of concentric circularperiodic structure 12.

The plasmon focusing antenna is manufactured as will be described below.On the low concentration Si layer 16 and the SiO₂ oxidizing film 17, forexample, a Ti film (not shown) 10 nm thick is formed. The Ti filmfunctions as a Schottky electrode for the low-concentration Si layer 16,and as a metal layer firmly contacting the SiO₂ thermally oxidized film17. An electrically conductive thin film 11 made of Ag and having athickness of 100 nm is formed on the Ti film. Then, a slit-shapedopening 13, which has a size of 400 nm×100 nm, is made in theelectrically conductive thin film 11. Further, a concentric circularperiodic structure 12 having a depth of 50 nm is fabricated. A jointperiodic structure A (for example, ten cycles) is arranged in the sameway as shown in FIG. 1. A reflective periodic structure B (for example,five cycles) is arranged outside the joint periodic structure A.

Assume that the light received has a wavelength of 850 nm. Then, theperiodic structure has a diameter of about 14 μm for a passivation typeelement (Pc=560 nm). The light-receiving region has a diameter of 11μm). The light transmitted through a single-mode optical fiber can bereceived by means of bat joint coupling. The light-receiving layer 16is, for example, 2 μm thick. The thermally oxidized SiO₂ film 17 that is2 μm thick is formed on the light-receiving region. Thelow-concentration Si layer 16, except the light-receiving part (locatedbelow the opening 13), have its upper part (about 1 micron thick)becomes a thermally oxidized SiO₂ film 17. The remaining part of the Silayer 16 is about 1 micron thick.

This configuration provides a photo detector having goodcharacteristics, such as light-receiving efficiency of about 10%(photoelectric conversion coefficient of 0.08 A/W) and response speed of15 GHz or more.

Thus, in this embodiment, the photoelectric conversion area of the photodetector can be far smaller than the area of the light-receiving antenna(i.e., plasmon focusing antenna), or considerably smaller than that of acircle whose diameter is the wavelength of the light received. Further,the opening 13 for allowing the passage of surface plasmon is shapedlike a slit and can therefore be smaller than a circular opening of thesame diameter, without causing a decrease in the amount of lighttransmitted. This can improve the response speed. Hence, this embodimentcan provide a photo detector that excels in light-receiving efficiencyand response speed.

Second Embodiment

There will be described the plasmon focusing antenna unit used in aphoto detector according to a second embodiment referring to FIG. 5. Thecomponents 21 to 23 shown in FIG. 5 are equivalent to the components11-13 shown in FIG. 1, respectively, and will not be described.

In the first embodiment described above, a part of the incidence light,which has been polarized in a specific direction, is focused, and anasymmetrical opening (i.e., slit) performs selective transmission ofpolarized light. In the present embodiment, the polarization directionis focused (the incidence light is focused in non-selection manner, thatis, light polarized in any direction is focused), and a syntheticopening composed of asymmetrical openings (slits) that intersect witheach other at right angles performs separation and transmission ofpolarized light.

That is, two antenna-slit assemblies, each being of the type shown inFIG. 1 are combined, with the slits intersecting with each other atright angles, at their mutual center, as is illustrated in FIG. 5. As aresult, the slits form a cross-shaped opening 23 that differs from theopening of the conventional plasmon focusing antenna, though the secondembodiment is a concentric circular periodic structure like theconventional plasmon focusing antenna. The long sides of the slitsconstituting the cross-shaped opening 23 are longer than half (½) thewavelength of surface plasmon, and the short sides of these slits areshorter than half (½) the wavelength of the surface plasmon.

The cross-shaped opening 23 is characterized in that the inter-topdistance (top length measured along the long sides of the slits) isequal to or longer than half the plasmon wavelength. Hence, the openingcan maintain high transmissivity even if the cross-shaped slit has awidth (measured along the short sides of the slits) is considerablysmaller than half the plasmon wavelength.

The principle of this is basically the same as that of the slit-shapedopening and can be easily understood if the cross-shaped opening isdivided into two slit-shaped openings. That is, each slit has hightransmissivity to light polarized in a specific direction and a lowtransmissivity to light polarized in the direction at right angles tothe specific direction. However, since the slits intersect with eachother at right angles, a light beam polarized in both directions thatenters the opening 23 is split into components that can easilytransmitted through the slits, respectively. These components of lightpass through the two slits, respectively. As a result, the light beampasses through the opening, regardless of the polarization direction.

Consider a polarized light beam inclined at 45° to the long sides of oneof the slits defining the cross-shaped opening. If only one slit isprovided, one half of the light passes through the opening. The otherhalf of the light is repeatedly reflected in the plasmon focusingantenna and is eventually dispersed or absorbed. However, since anotherslit intersecting with the slit at right angles is provided, the otherhalf of the light fast enters the other slit. As a result, two surfaceplasmons of the light components that intersect with each other passthrough the two slits, respectively, reaching the other side of thecross-shaped opening. At the exit of the cross-shaped opening, the lightcomponents are synthesized, whereby the original surface plasmon isrestored.

Thus, transmissivity as high as that of a circular opening larger thanhalf the plasmon wavelength can be attained if the inter-top distance ofthe cross-shaped slit is equal to or longer than half the plasmonwavelength and if the slit width is sufficiently reduced, thusdecreasing the area of the opening. In addition, a photo detector can beprovided, which has a small light-receiving area, little depends on thepolarization direction of incidence light and operates at high speed.

FIGS. 6 and 7 are perspective views, each not showing a quarter cut awayalong lines I-I and taken along part I-13-I′ shown in FIG. 5. Thecomponents 21 to 25 shown in FIGS. 6 and 7 are equivalent to thecomponents 11-15 shown in FIG. 3, respectively.

This plasmon focusing antenna is manufactured as will be explainedbelow. A Ti film 10 nm thick (not shown), for example, is formed on alow-concentration Si layer 26 and a SiO₂ thermally oxidized film 27. TheTi film functions as a Schottky electrode for the low-concentration Silayer 26, and as a metal layer firmly contacting the SiO₂ thermallyoxidized film 27. An electrically conductive thin film 21 made of Ag andhaving a thickness of 100 nm is formed on the Ti film. Then, across-shaped opening 23 is made, which has an inter-top distance of 20nm and a slit width (line width) of 100 nm. Further, a concentriccircular periodic structure 22 that is 50 nm deep is formed, thusarranging a joint periodic structure A (for example, ten cycles) asshown in FIG. 1. A reflective periodic structure B (for example, fivecycles) is arranged outside the structure A and concentric to thestructure A, as is illustrated in FIG. 5.

If the light received has wavelength of 850 nm, the element is a SiO₂passivation-type one (Pc=560 nm) and has a periodic structure having adiameter of about 14 micrometers. The diameter of the light beamreceived is about 11 micrometer. The light can be received viasingle-mode optical fibers that are butt-jointed. The light-receivinglayer 26 is, for example, 2 micrometers thick, and the thermallyoxidized SiO₂ film 27 defining the light-receiving region is 2micrometers thick. As a result, the low-concentration Si layers 26,except the light-receiving part (located below the opening 23), isthermally oxidized to the depth of about 1 micrometer, forming thethermally oxidized SiO₂ film 27. The thickness of the Si layer 26decreases to about 1 micrometer.

Having the configuration described above, the photo detector haslight-emitting efficiency of 10% (photoelectric conversion coefficientof 0.08 A/W) and a response speed of 15 GHz or more, which do not dependon the direction in which the incidence light is polarized. The crosssection of the opening 23 is about twice as much as in the firstembodiment, and the light-receiving area is also about twice as much.Nonetheless, the parasitic capacitance of the element is small enough.The element has a response speed similar to that of the firstembodiment, because the response characteristic of the photo detectordepends on the time the carriers need to pass through the Si layer 26.Additional advantages and modifications will readily occur to thoseskilled in the art. Therefore, the invention in its broader aspects isnot limited to the specific details and representative embodiments shownand described herein. Accordingly, various modifications may be madewithout departing from the spirit or scope of the general inventiveconcept as defined by the appended claims and their equivalents.

Third Embodiment

FIGS. 8 and 9 are perspective views showing the configuration of anoptically interconnected LSI according to a third embodiment of thepresent invention. The components identical to those shown in FIGS. 6and 7 are designated with the same reference numbers in FIGS. 8 and 9,and will not be described.

In FIG. 8, number 31 designates a semiconductor light-receiving unit,number 32 indicates CMOS transistors, number 33 designates Cu lines,number 34 indicates an interlayer insulating film, number 35 designatesa multilayer interconnection structure, and number 36 denotespillar-shaped conductor (metal pillar). This embodiment constitutes anoptically interconnected LSI, using a photo detector that has across-shaped opening of the type shown in FIGS. 6 and 7 and thereforehas no polarization dependency. In FIG. 9, number 31 a denotes a p-typewell, and number 31 b an n-type light-receiving layer. P type well 31 ais a reversal conduction well and is electrically isolated from then-type substrate 24.

The opening (cross-shaped) 23 penetrates the multilayer interconnectionstructure 35. Thus, a surface plasmon from a plasmon focusing antennacan be transmitted through this opening 35. Therefore, the metal pillar(conductive pillar) 36, which is thicker than a focusing antenna,extends to the surface of the Si substrate. Since opening 23 is shapedlike a cross, the metal pillar 36 penetrating the multilayerinterconnection structure 35 has a cross section shaped like a cross.Therefore, the metal pillar 36 does not occupy such a large layout areaas a metal pillar having a circular cross section. The metal pillar canbe embedded in the multilayer interconnection structure 35 or in the gapat the boundary between sections (square regions) of the transistorlayout section.

The metal pillar 36 provided in the multilayer interconnection structure35 and having a cross section shaped like a cross may be made of Cu thatis the material of the multilayer interconnection. However, Cu involvesa comparatively large absorption loss. Thus, the pillar 36 should betterbe made of Ag, if possible. In that case, after the multilayerinterconnection is formed, a cross-shaped groove is made, penetratingthe interlayer insulation film 34 and some of the Cu lines 33 (e.g.,bias lines of the photo detector). The groove is filled with Ag, therebyforming a metal pillar 36 having a cross section shaped like a cross.Then, a plasmon focusing antenna is formed and a cross-shaped openingmay be made by dry etching.

The multilayer interconnection of LSI is generally about 10 micrometersthick, and the plasmon transmission distance of the cross-shaped openingis around 10 micrometers. In order to reduce the transmission loss, itis desired that the opening be sufficiently large, unlike in the firstembodiment where the opening penetrates the conductive film 22 only. Forexample, incidence light having wavelength of 850 nm may be transmittedfor 10 micrometers through an Ag waveguide having a cross-shaped opening23 on Ag that has inter-top distance of 450 nm and a cross-groove widthof 200 nm. Then, transmission efficiency of about 20% can be attained.The effective area product at this time (acceptance surface product) isthe area 420 nm in diameter about a circular opening, and does not turninto area to the extent that the speed of response of a photo detectoris reduced from about 15 GHz.

Therefore, this embodiment can be fully restored with a gain attained byusing only one or two transistors, even if the surface plasmon istransmitted from the uppermost LSI multilayer interconnection lines tothe surface of the SI substrate. In addition, the embodiment isadvantageous because it can operate at high speed (using, for example,10 GHz clock), thanks to the optical interconnection, without degradingthe wave shape or increasing the superfluous jitter. Thus, thisembodiment can of course achieve the same advantage as the secondembodiment. Further, the light-receiving antenna can be positioned awayfrom the LSI region in which transistors are provided. Hence, opticalinterconnection can be used, almost not lowering the integration densityof transistors, and the restriction on the layout of multilayerinterconnection can reduced very much. The photo detector, orphotoelectric conversion unit, can be formed in a narrow gap in thetransistor region (Si substrate) of the LSI. The photo detector cantherefore be almost directly connected to the transistors. Therefore,the element is scarcely degraded, or the noise will scarcely increase.High-speed optical lines can effectively be constituted in the LSI chip,enabling the LSI chip to operate at high speed and high efficiency. Thephoto detector can much contribute to the sophistication of datacommunications apparatuses.

That is, a high-speed optical interconnection can be accomplished in theLSI chip. The LSI configuration is simple, signals are not degraded, andno crosstalk occurs. Moreover, an optically interconnected LSI whichdoes not spoil the rapidity of an LSI degree of location or an opticalline is realizable.

(Modifications)

The present invention is not limited to the embodiments described above.The embodiments described above are no more than configuration examples.Other means (materials, sizes etc.) can be used in accordance with thespirit of the present invention.

The materials, shapes, arrangements, etc. which were shown in theembodiments are merely examples. Further, the embodiments may be reducedto practice in any possible combination. In the first embodiment, forexample, the photo detector much depends on polarized light and becomessensitive to the dislocation of the polarization plane. This may bepositively utilized. That is, two photo detectors according to the firstembodiment are prepared and arranged, one intersecting at right angleswith the other. Thus, light beams polarized, multiplexed and applied ata time can be polarized and separated.

The opening need not be left void. It may be filled with dielectricmaterial such as SiO₂ or SiN. The light-receiving unit is not limited toa photodiode. Instead, it may be a phototransistor. Moreover, aphotoelectric conversion member may be used, which converts light intoelectric signals.

Additional advantages and modifications will readily occur to thoseskilled in the art. Therefore and the invention in its broader aspectsis not limited to the specific details and representative embodimentsshown and described herein. Accordingly, various modifications may bemade without departing from the spirit or scope of the general inventiveconcept as defined by the appended claims and their equivalents.

1. A photo detector with a plasmon focusing antenna, comprising: anelectrically conductive thin film which has a first surface, a secondsurface opposite to the first surface and a coupling periodic structureprovided on the first surface, the electrically conductive thin filmconfigured to convert incident light to surface plasmon and including anopening penetrating the first surface and the second surface within thecoupling periodic structure, and the opening being formed of a slithaving a length longer than half a wavelength of the surface plasmon ina direction that intersects at a right angle with a polarizationdirection of the incident light and a width narrower than half thewavelength of the surface plasmon in a direction that is parallel to thepolarization direction; and a light-receiving unit configured to receivethe surface plasmon and arranged at one end of the opening in the secondsurface.
 2. The photo detector according to claim 1, wherein thecoupling periodic structure is a concentric circular structure using theopening as center and is selectively provided in sector-shaped regionssymmetrically extending from the opening in the polarization direction.3. The photo detector according to claim 2, further comprising areflective periodic structure which is formed outside the couplingperiodic structure on the first surface of the electrically conductivethin film, and has a concentric circular structure using the opening ascenter, the reflective periodic structure reflecting and confining thesurface plasmon.
 4. The photo detector according to claim 3, wherein thecoupling periodic structure has cycle Pc given by:Pc≅λ(1/∈1+1/∈2)^(1/2) where λ is a wavelength of the incidence light, ∈1is a dielectric constant of the electrically conductive thin film, and∈2 is a dielectric constant of material contacting the electricallyconductive thin film, and the reflective periodic structure has cycle Pbset to:Pb=Pc/2.
 5. The photo detector according to claim 3, wherein thecoupling periodic structure and the reflective periodic structure aredug patterns made by etching parts of the surface of the electricallyconductive thin film.
 6. The photo detector according to claim 1,wherein the electrically conductive thin film is formed on asemiconductor substrate, and the light-receiving unit is comprised of aphotodiode formed on a surface of the semiconductor substrate.
 7. Anoptically interconnected LSI comprising: a semiconductor substrate whichhas a main surface; a transistor unit configured to be integrally formedon the main surface of the semiconductor substrate; amultilayer-interconnection structure unit which is provided on thetransistor unit; an electrically conductive thin film which is providedon the multilayer-interconnection structure unit and has an uppersurface, a lower surface, a coupling periodic structure formed on theupper surface, and an opening penetrating the upper surface and thelower surface, the opening being formed of a slit having a length longerthan half a wavelength of a surface plasmon converted from incidentlight in a direction that intersects at a right angle with apolarization direction of the incident light and a width narrower thanhalf the wavelength of the surface plasmon in a direction that isparallel to the polarization direction; an electrically conductivepillar having upper and lower surfaces and configured to penetrate theupper and lower surfaces of the multilayer-interconnection structureunit and has a waveguide opening penetrating the upper and lowersurfaces of the electrically conductive pillar, an end of the waveguideopening communicating with the opening of the electrically conductivethin film; and a semiconductor light-receiving unit which is provided onthe surface of the semiconductor substrate and located at the other endof the waveguide opening of the electrically conductive pillar.
 8. Theoptically interconnected LSI according to claim 7, wherein the openingand has long sides longer than half (½) the wavelength of the surfaceplasmon and short sides shorter than half (½) the wavelength of thesurface plasmon, and the coupling periodic structure is a concentriccircular structure using the opening as center and is selectivelyprovided in sector-shaped regions symmetrically extending from theopening along the short sides of the opening.
 9. The opticallyinterconnected LSI according to claim 8, further comprising a reflectiveperiodic structure which is formed outside the coupling periodicstructure on the surface of the electrically conductive thin film, andhas a concentric circular structure using the opening as center, thereflective periodic structure reflecting and confining the surfaceplasmon.
 10. The optically interconnected LSI according to claim 9,wherein the coupling periodic structure and the reflective periodicstructure are dug patterns made by etching parts of the surface of theelectrically conductive thin film.
 11. The optically interconnected LSIaccording to claim 7, wherein the opening is shaped like a cross anddefined by two slits intersecting with each other at a right angle, eachslit having long sides longer than half (½) the wavelength of thesurface plasmon and short sides shorter than half (½) the wavelength ofthe surface plasmon, and the coupling periodic structure is a concentriccircular structure using the opening as center.
 12. The opticallyinterconnected LSI according to claim 11, further comprising areflective periodic structure which is formed outside the couplingperiodic structure on the surface of the electrically conductive thinfilm, and has a concentric circular structure using the opening ascenter, the reflective periodic structure reflecting and confining thesurface plasmon.
 13. The optically interconnected LSI according to claim12, wherein the coupling periodic structure and the reflective periodicstructure are dug patterns made by etching parts of the surface of theelectrically conductive thin film.